Description
Product Name: Jcp500 Magnetron Sputtering Coating Equipment Model NO.: JCP500 Trademark: Technnol Science Transport Package: Wood Specification: Customize Origin: China HS Code: 8479899990 Product Description EquipmentNameMagnetronSputteringCoatingEquipmentModelJCP500ChamberStructureVerticalfrontdoorstructure,rearpumpingsystemChamberSizeΦ500×H420mmBakingTemperatureRoomtemperature~500ºCSputteringPathUpward/downward(optional)RotatingSubstrateHolderΦ150mmFilmThicknessNonuniformityWithinthescopeofΦ100mm≤±5.0%SputteringTarget/EvaporationElectrode2~4PcsofΦ2,Φ3,Φ4Inchesmagnetrontargets (optional)ProcessGas2-3RoutesgasflowcontrolControlMethodPLCControl/IPCautomaticcontrol(optional)OccupiedArea(Mainframe)L1800×W800×H1900mmPower≥15KWApplicationColleges&universities,researchinstitutesandenterprisesdevelopnewthinfilmmaterialsandsamllbatchproductionFeature/Function1.Dual-usesputteringandevaporationfunction,lessoccupiedarea,competitiveprice,stableperformanceandlowmaintenancecosts;2.Canbeusedforthepreparationofsingleandmulti-layermetalfilm,dielectricfilm,semiconductorfilm,magneticfilm,sensorfilm,heat-resistantalloyfilm,hardfilm,corrosion-resistantfilm,etc.;3.Coatingsamples:silver,aluminum,copper,nickel,chromium,nickel-chromiumalloy,titaniumoxide,ITO,silica,etc.;4.Singletargetsputtering,multi-targetsputteringinturns,multi-targetsputteringsimultaneouslyandsoonfunctions.
