详细说明
Product Name: Hot Sale Horizontal CVD Furnace for Semiconductor Materials Lab Rotary Tube Furnace, Ce Approved 3 Zone Tube Furnace CVD Machine for Annealing Structure: Horizontal Type Max.Temperature: 1200c Working Temperature: 1100c Continuously Thermocouple: K Type Temperature Accuracy: +/-1c Temperature Uniformity: +/-5c Heating Element: Resistance Wire Chamber Size: Dia100*300mm Heating Zone: 300mm Tube: Quartz Tube Length: 1000mm Temperature Control: Digital Chamber: Ceramic Insulation Application: Sintering Voltage: 220V Power: 9kw Trademark: HIQ Transport Package: Wooden Box Specification: Dia100*300 Origin: China HS Code: 85141090 Product Description Hot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingThis is a three-zone rotary tube furnace with a feeder and a receiving tank. The feeder can feed the powder into the furnace tube at a rated rate, and the powder material can be continuously coated by the CVD method under the atmosphere protection environment. The receiving tank can collect the processed powder in an atmosphere protection environment.1200C 2-5" Single Zone Hot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingThe rotary tube furnace is widely used for sintering inorganic compounds, and the working tube can be rotated 360° by mechanical transmission, so that the materials in the tube are stirred and mixed to obtain uniform heating effect.This tube furnace is designed to coat the conductive layer on the cathode material of Lithium-ion battery (such as LiFePO3, LiMnNiO3), and also to prepare Si/C anode material by CVD method.Hot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingHot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingTechnical Parameters:Vacuum tube furnaceMax power4.5kwTube materialnickel-based alloyTube diameter100mmTube length1200mmFurnace chamber length660mmHeating zone length200mm+200mm+200mmConstant temperature zone200mmOperating temperature0~1100ºCTemperature control accuracy±1ºCTemperature control mode30 or 50 segment program temperature controlDisplay modeLCDSealing method304 stainless steel vacuum flangeFlange interface1/4" cutting sleeve joint, KF16/25/40 jointVacuum4.4×10E-3PaPower supplyAC:220V 50/60HzInclination angle0~15°Rotating speed0~20 rpmGas supply systemModelHIQ-3FGas channel3-channelMeasuring unitGas float flow meterMeasuring rangeA channel: 0~100ml H2 gasRemarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.B channel: 16~160ml N2 gasC channel: 25~250ml Ar gasmeasurement accuracy±2.0%Pipe pressure resistance3MPaWorking pressure difference50~300KPaConnecting pipe304 stainless steelGas channel304 stainless steel needle valveInterface specification1/4" cutting sleeve joint for gas inlet and outletExhaust systemMechanical pumpVRD-4Pumping rate4L/S Exhaust interfaceKF16Vacuum measurementPirani gaugeUltimate vacuum1×10E-1PaPower supplyAC:220V 50/60HzPumping interfaceKF16Hot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingOur servicesHot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingGuarantee:·One year,We provide permanent technology support.Warranty period appear quality problems free maintenance.After the warranty we need to replace parts we provide at cost price.·Any technology question, we can provide video instruction, remote video instruction or fly to your country.·Any problem we will handle in time within 24 hoursQualityHot sale horizontal CVD Furnace for semiconductor materials lab rotary tube furnace,CE Approved 3 zone tube furnace cvd machine for annealingfessional QC team and every steps of processing we will strictly on quality.·Our products will beconform international standards and has the CE certificate.We know how important it is to maintain continuity of production. We take responsibility for the proper functioning of your equipment, leaving you time to run your business.Servicing equipment during a breakdown is the worst possible scenario. System failure is unexpected, surprising and always at the wrong time. Alargeis prepared to deal with these situations. In order to raise the service reliability of your equipment, we offer comprehensive support services.Professional technical services by HENANHIQ FURNACE CO,.LTDThe engineering team atHIQ has the knowledge and experience to manage fleets of heat treating equipment in a planned and professional manner regardless of the equipment manufacturer. The solutions we offer are universal because they are based on best practices for failure prevention in the best sense of the word.Professional Technical Services provided byHIQis more than the repair in case of failure.We understand how the equipment works and we increase uptime with the help of automated process maintenance that supports equipment architecture and technology solutions includingrenovation, modernization, and relocation services. Alargecarries out preventive inspections and the subsequent preventive measures using advanced tools in the field of metering and reporting.You no longer have to worry about downtime and additional costs.HIQservices are available around the clock, 7 days a week.
